Collection of ENEA technology and expertise
Systems for epitaxial growth of synthetic diamond using the "Chemical Vapour Deposition" technique; systems for thin film deposition; development and prototyping of electronic devices based on synthetic diamond, e.g. radiation detectors.
Application sectors
Problem to solve
Synthetic diamond, in the form of thin films, is an excellent candidate for the development of detectors and sensors that must operate in harsh environments (chemical agents, radiation and high-energy particles, etc.) and high noise conditions (electromagnetic interference); one example is real-time diagnostics in future fusion reactors. It also exhibits very interesting ultra-fast response characteristics for the development of electronic devices and circuits. Additionally, there are applications in dosimetry and in the space and biomedical fields. Another form of carbon, graphene, is of interest for the development of innovative materials.
Description
The main equipment available in the laboratory includes: ASTeX-like CVD (Chemical Vapour Deposition) non-commercial reactor, which uses a microwave generator to create and position a plasma capable of inducing the epitaxial growth of thin films of diamond and graphene from a gaseous phase (H2 and CH4) onto different substrates. Chemical fume hood for sample treatment and cleaning using various chemicals. Biological fume hood for examining samples in a relatively clean environment. Metal or oxide film deposition system (e-beam evaporator). Ultrasound wire-bonder for metal bonding of electrodes on micro-devices. The equipment is designed to operate in a clean environment with a low contribution of contaminants.
Innovative aspects and advantages
- Ability to deposit thicker layers compared to existing systems.
- Characterization of devices using various types of radioactive sources (neutrons, electrons, gamma, alpha).
Admissible applications
- Electronic devices and circuits on high-purity synthetic diamond film.
- Innovative materials and sensors based on graphene.
- Radiation and particle detectors based on diamond, characterised by high radiation resistance, immunity to electromagnetic interference, ultra-fast response, and high signal-to-noise ratio (e.g., neutron detectors for nuclear fusion).
- UV/X radiation sensors for diagnostics and dosimetry based on high-purity diamond thin films.
Research group involved
Revision date
26-05-2025
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